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Surface Micromachining for MEMS Systems

Surface Micromachining for MEMS Systems
Surface micromachining techniques enable the manufacture of highly reliable, robust microelectromechanical system (MEMS) devices, which engineers can use along with microcontrollers to develop innovative, next-generation products. In this article, Micralyne provides an overview of MEMS fabrication processes and techniques in surface micromachining.
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